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Sputtering Preparation of Silicon Nitride Thin Films for Gate Dielectric Applications
Sputtering Preparation of Silicon Nitride Thin Films for Gate Dielectric Applications
Sputtering Preparation of Silicon Nitride Thin Films for Gate Dielectric Applications
Pereira, L. (Autor:in) / Aguas, H. (Autor:in) / Igreja, R. (Autor:in) / Martins, R. M. S. (Autor:in) / Nedev, N. (Autor:in) / Raniero, L. (Autor:in) / Fortunato, E. (Autor:in) / Martins, R. (Autor:in)
MATERIALS SCIENCE FORUM ; 455/456 ; 69-72
01.01.2004
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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