Silicon carbide CVD homoepitaxy on wafers with reduced micropipe density

Saddow, S.E. / Mazzola, M.S. / Rendakova, S.V. et al. | British Library Online Contents | 1999

Growth of Micropipe-Free Single Crystal Silicon Carbide (SiC) Ingots via Physical Vapor Transport (PVT)

Basceri, C. / Khlebnikov, I. / Khlebnikov, Y. et al. | British Library Online Contents | 2006

Giant Burgers Vector Micropipe-Dislocations in Silicon Carbide Investigated by Atomic Force Microscopy

Pernot, E. / Hartwig, J. / Pons, M. et al. | British Library Online Contents | 2006

Large area silicon carbide devices fabricated on SiC wafers with reduced micropipe density

Dmitriev, V. / Rendakova, S. / Kuznetsov, N. et al. | British Library Online Contents | 1999

Investigation of micropipe and defects in molten KOH etching of 6H n-silicon carbide (SiC) single crystal

Mahajan, S. / Rokade, M. V. / Ali, S. T. et al. | British Library Online Contents | 2013