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Formation of Epitaxial Defects by Threading Screw Dislocations with a Morphological Feature at the Surface of 4^o Off-Axis 4H-SiC Substrates
Formation of Epitaxial Defects by Threading Screw Dislocations with a Morphological Feature at the Surface of 4^o Off-Axis 4H-SiC Substrates
Formation of Epitaxial Defects by Threading Screw Dislocations with a Morphological Feature at the Surface of 4^o Off-Axis 4H-SiC Substrates
Aigo, T. (Autor:in) / Ito, W. (Autor:in) / Tsuge, H. (Autor:in) / Yashiro, H. (Autor:in) / Katsuno, M. (Autor:in) / Fujimoto, T. (Autor:in) / Yano, T. (Autor:in) / Lebedev, A.A. / Davydov, S.Y. / Ivanov, P.A.
01.01.2013
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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