Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Thermal annealing effect on zinc nitride thin films deposited by reactive rf-magnetron sputtering process
Thermal annealing effect on zinc nitride thin films deposited by reactive rf-magnetron sputtering process
Thermal annealing effect on zinc nitride thin films deposited by reactive rf-magnetron sputtering process
Wen, T. (Autor:in) / Gautam, M. (Autor:in) / Soleimanpour, A.M. (Autor:in) / Jayatissa, A.H. (Autor:in)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 16 ; 318-325
01.01.2013
8 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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