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Thermal annealing effect on zinc nitride thin films deposited by reactive rf-magnetron sputtering process
Thermal annealing effect on zinc nitride thin films deposited by reactive rf-magnetron sputtering process
Thermal annealing effect on zinc nitride thin films deposited by reactive rf-magnetron sputtering process
Wen, T. (author) / Gautam, M. (author) / Soleimanpour, A.M. (author) / Jayatissa, A.H. (author)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 16 ; 318-325
2013-01-01
8 pages
Article (Journal)
English
DDC:
621.38152
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