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Influence of sputtering power on crystal quality and electrical properties of Sc-doped AlN film prepared by DC magnetron sputtering
Influence of sputtering power on crystal quality and electrical properties of Sc-doped AlN film prepared by DC magnetron sputtering
Influence of sputtering power on crystal quality and electrical properties of Sc-doped AlN film prepared by DC magnetron sputtering
Yang, J. c. (Autor:in) / Meng, X. q. (Autor:in) / Yang, C. t. (Autor:in) / Zhang, Y. (Autor:in)
APPLIED SURFACE SCIENCE ; 287 ; 355-358
01.01.2013
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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