Influence of N"2/Ar-flow ratio on crystal quality and electrical properties of ScAlN thin film prepared by DC reactive magnetron sputtering: Fid-Bau Portal

Influence of N"2/Ar-flow ratio on crystal quality and electrical properties of ScAlN thin film prepared by DC reactive magnetron sputtering

Yang, J. c. / Meng, X. q. / Yang, C. t. / Fu, W. j.

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Influence of N"2/Ar-flow ratio on crystal quality and electrical properties of ScAlN thin film prepared by DC reactive magnetron sputtering

Yang, J. c. / Meng, X. q. / Yang, C. t. / Fu, W. j.

Influence of N"2/Ar-flow ratio on crystal quality and electrical properties of ScAlN thin film prepared by DC reactive magnetron sputtering

Yang, J. c. / Meng, X. q. / Yang, C. t. / Fu, W. j.

Zugriff

Zugriff über TIB

Verfügbarkeit in meiner Bibliothek prüfen

Bestellung bei Subito €

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Ähnliche Titel

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Titel:

Influence of N"2/Ar-flow ratio on crystal quality and electrical properties of ScAlN thin film prepared by DC reactive magnetron sputtering

Beteiligte:

Yang, J. c. (Autor:in) / Meng, X. q. (Autor:in) / Yang, C. t. (Autor:in) / Fu, W. j. (Autor:in)

Erschienen in:

APPLIED SURFACE SCIENCE ; 282 ; 578-582

Erscheinungsdatum:

01.01.2013

Format / Umfang:

5 pages

ISSN:

0169-4332

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 621.35

Yang, J. c. / Meng, X. q. / Yang, C. t. et al. | British Library Online Contents | 2013

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Yang, F. F. / Fang, L. / Zhang, S. F. et al. | British Library Online Contents | 2008

Preparation of ScAlN film on Hastelloy alloys under different sputtering power

Yang, Y. / Zhou, D. / Yang, C. et al. | British Library Online Contents | 2015

Influence of N2 flow ratio on the properties of hafnium nitride thin films prepared by DC magnetron sputtering

Yuan, L. / Fang, G. / Li, C. et al. | British Library Online Contents | 2007

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