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Study of thermophysical properties of crystalline silicon and silicon-rich silicon oxide layers
Study of thermophysical properties of crystalline silicon and silicon-rich silicon oxide layers
Study of thermophysical properties of crystalline silicon and silicon-rich silicon oxide layers
Gavrylyuk, O. O. (Autor:in) / Semchyk, O.Yu. (Autor:in) / Bratus, O. L. (Autor:in) / Evtukh, A. A. (Autor:in) / Steblova, O. V. (Autor:in) / Fedorenko, L. L. (Autor:in) / Castillejo, M. / Kautek, W. / Millon, E. / O'Connor, G.
01.01.2014
3 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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