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Study of thermophysical properties of crystalline silicon and silicon-rich silicon oxide layers
Study of thermophysical properties of crystalline silicon and silicon-rich silicon oxide layers
Study of thermophysical properties of crystalline silicon and silicon-rich silicon oxide layers
Gavrylyuk, O. O. (author) / Semchyk, O.Yu. (author) / Bratus, O. L. (author) / Evtukh, A. A. (author) / Steblova, O. V. (author) / Fedorenko, L. L. (author) / Castillejo, M. / Kautek, W. / Millon, E. / O'Connor, G.
2014-01-01
3 pages
Article (Journal)
English
DDC:
621.35
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