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Single Event Gate Rupture in SiC MOS Capacitors with Different Gate Oxide Thicknesses
Single Event Gate Rupture in SiC MOS Capacitors with Different Gate Oxide Thicknesses
Single Event Gate Rupture in SiC MOS Capacitors with Different Gate Oxide Thicknesses
Deki, M. (Autor:in) / Makino, T. (Autor:in) / Kojima, K. (Autor:in) / Tomita, T. (Autor:in) / Ohshima, T. (Autor:in) / Okumura, H. / Harima, H. / Kimoto, T. / Yoshimoto, M. / Watanabe, H.
01.01.2014
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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The electrical properties of MIS capacitors with ALN gate dielectrics
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