Addendum: Compliant electrostatic chuck based on hairy microstructure (2013 Smart Mater. Struct. 22 015019) and Electrostatic chuck consisting of polymeric electrostatic inductive fibers for handling of objects with rough surfaces (2013 Smart Mater. Struct. 22 095010): Fid-Bau Portal

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Addendum: Compliant electrostatic chuck based on hairy microstructure (2013 Smart Mater. Struct. 22 015019) and Electrostatic chuck consisting of polymeric electrostatic inductive fibers for handling of objects with rough surfaces (2013 Smart Mater. Struct. 22 095010)

Saito, S. / Kikutani, T. / Takahashi, K. / Takarada, W. / Soda, F. / Sawai, K. / Dhelika, R.

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Addendum: Compliant electrostatic chuck based on hairy microstructure (2013 Smart Mater. Struct. 22 015019) and Electrostatic chuck consisting of polymeric electrostatic inductive fibers for handling of objects with rough surfaces (2013 Smart Mater. Struct. 22 095010)

Saito, S. / Kikutani, T. / Takahashi, K. / Takarada, W. / Soda, F. / Sawai, K. / Dhelika, R.

Addendum: Compliant electrostatic chuck based on hairy microstructure (2013 Smart Mater. Struct. 22 015019) and Electrostatic chuck consisting of polymeric electrostatic inductive fibers for handling of objects with rough surfaces (2013 Smart Mater. Struct. 22 095010)

Saito, S. / Kikutani, T. / Takahashi, K. / Takarada, W. / Soda, F. / Sawai, K. / Dhelika, R.

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Titel:

Addendum: Compliant electrostatic chuck based on hairy microstructure (2013 Smart Mater. Struct. 22 015019) and Electrostatic chuck consisting of polymeric electrostatic inductive fibers for handling of objects with rough surfaces (2013 Smart Mater. Struct. 22 095010)

Beteiligte:

Saito, S. (Autor:in) / Kikutani, T. (Autor:in) / Takahashi, K. (Autor:in) / Takarada, W. (Autor:in) / Soda, F. (Autor:in) / Sawai, K. (Autor:in) / Dhelika, R. (Autor:in)

Erschienen in:

Selected papers from the 7th World Congress on Biomimetics, Artificial Muscles and Nano-Bio (BAMN2013) ; 079401

SMART MATERIALS AND STRUCTURES ; 23

Erscheinungsdatum:

01.01.2014

Format / Umfang:

79401 pages

ISSN:

Medientyp:

Aufsatz (Zeitschrift)

Format:

Print

Sprache:

Englisch

Klassifikation:

DDC: 530

© Metadata Copyright the British Library Board and other contributors. All rights reserved.

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