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Effect of Different Oxygen Flow Rate on Physical Properties of ITO Thin Films Deposited by Ion-Assistant Electron Beam Evaporation
Effect of Different Oxygen Flow Rate on Physical Properties of ITO Thin Films Deposited by Ion-Assistant Electron Beam Evaporation
Effect of Different Oxygen Flow Rate on Physical Properties of ITO Thin Films Deposited by Ion-Assistant Electron Beam Evaporation
Qiu, Y. (Autor:in) / Meng, D.Y. (Autor:in) / Chen, Y.F. (Autor:in) / Zu, C.K. (Autor:in) / Pan, W. / Gong, J.
01.01.2014
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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