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Microstructure and optical properties of SiCN thin films deposited by reactive magnetron sputtering
Microstructure and optical properties of SiCN thin films deposited by reactive magnetron sputtering
Microstructure and optical properties of SiCN thin films deposited by reactive magnetron sputtering
MATERIALS LETTERS ; 131 ; 148-150
01.01.2014
3 pages
Aufsatz (Zeitschrift)
Englisch
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