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On the target surface cleanness during magnetron sputtering
On the target surface cleanness during magnetron sputtering
On the target surface cleanness during magnetron sputtering
Schelfhout, R. (Autor:in) / Strijckmans, K. (Autor:in) / Boydens, F. (Autor:in) / Depla, D. (Autor:in)
APPLIED SURFACE SCIENCE ; 355 ; 743-747
01.01.2015
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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