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Fabrication of piezoelectric thick films for development of micromechanical cantilevers
Fabrication of piezoelectric thick films for development of micromechanical cantilevers
Fabrication of piezoelectric thick films for development of micromechanical cantilevers
Kwon, T. (author) / Shin, K. S. (author) / Hyung, M. (author) / Eom, K. (author) / Kim, T. S. (author)
JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY ; 29 ; 3351-3356
2015-01-01
6 pages
Article (Journal)
English
DDC:
621
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