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Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition
Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition
Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition
Jang, Y. (Autor:in) / Yeo, S. (Autor:in) / Lee, H. B. (Autor:in) / Kim, H. (Autor:in) / Kim, S. H. (Autor:in)
APPLIED SURFACE SCIENCE ; 365 ; 160-165
01.01.2016
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition
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