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Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition
Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition
Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition
Jang, Yujin (Autor:in) / Yeo, Seungmin (Autor:in) / Lee, Han-Bo-Ram (Autor:in) / Kim, Hyungjun (Autor:in) / Kim, Soo-Hyun (Autor:in)
Applied surface science ; 365 ; 160-165
01.01.2016
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.44
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Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition
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