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Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition
Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition
Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition
Jang, Y. ( author ) / Yeo, S. ( author ) / Lee, H. B. ( author ) / Kim, H. ( author ) / Kim, S. H. ( author )
APPLIED SURFACE SCIENCE ; 365 ; 160-165
2016-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition
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