Low thermal budget surface preparation of Si and SiGe

Abbadie, A. / Hartmann, J. M. / Holliger, P. et al. | British Library Online Contents | 2004

Low thermal budget for Si and SiGe surface preparation for FD-SOI technology

Labrot, M. / Cheynis, F. / Barge, D. et al. | British Library Online Contents | 2016

Achieving a SiGe HBT epitaxial emitter with novel low thermal budget technique

Brabant, P. / Wen, J. / Italiano, J. et al. | British Library Online Contents | 2004

SiGe technology bears fruits

Berntgen, J. / Schueppen, A. / Maier, P. et al. | British Library Online Contents | 2002

Thermal reliability of thin SiGe epilayers

Wu, M. J. / Wen, H. C. / Chiang, T. Y. et al. | British Library Online Contents | 2012