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Low thermal budget for Si and SiGe surface preparation for FD-SOI technology
Low thermal budget for Si and SiGe surface preparation for FD-SOI technology
Low thermal budget for Si and SiGe surface preparation for FD-SOI technology
Labrot, M. (author) / Cheynis, F. (author) / Barge, D. (author) / M�ller, P. (author) / Juhel, M. (author)
APPLIED SURFACE SCIENCE ; 371 ; 436-446
2016-01-01
11 pages
Article (Journal)
English
DDC:
621.35
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