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Nanogrinding induced surface and deformation mechanism of single crystal β-Ga2O3
Nanogrinding induced surface and deformation mechanism of single crystal β-Ga2O3
Nanogrinding induced surface and deformation mechanism of single crystal β-Ga2O3
Gao, Shang (Autor:in) / Wu, Yueqin (Autor:in) / Kang, Renke (Autor:in) / Huang, Han (Autor:in)
Materials science in semiconductor processing ; 79 ; 165-170
01.01.2018
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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