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Nanogrinding induced surface and deformation mechanism of single crystal β-Ga2O3
Nanogrinding induced surface and deformation mechanism of single crystal β-Ga2O3
Nanogrinding induced surface and deformation mechanism of single crystal β-Ga2O3
Gao, Shang (author) / Wu, Yueqin (author) / Kang, Renke (author) / Huang, Han (author)
Materials science in semiconductor processing ; 79 ; 165-170
2018-01-01
6 pages
Article (Journal)
English
DDC:
621.38152
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