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Debris-free rear-side picosecond laser ablation of thin germanium wafers in water with ethanol
Debris-free rear-side picosecond laser ablation of thin germanium wafers in water with ethanol
Debris-free rear-side picosecond laser ablation of thin germanium wafers in water with ethanol
Zhang, Dongshi (Autor:in) / Gökce, Bilal (Autor:in) / Sommer, Steffen (Autor:in) / Streubel, René (Autor:in) / Barcikowski, Stephan (Autor:in)
Applied surface science ; 367 ; 222-230
01.01.2016
9 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.44
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