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Debris-free rear-side picosecond laser ablation of thin germanium wafers in water with ethanol
Debris-free rear-side picosecond laser ablation of thin germanium wafers in water with ethanol
Debris-free rear-side picosecond laser ablation of thin germanium wafers in water with ethanol
Zhang, Dongshi (author) / Gökce, Bilal (author) / Sommer, Steffen (author) / Streubel, René (author) / Barcikowski, Stephan (author)
Applied surface science ; 367 ; 222-230
2016-01-01
9 pages
Article (Journal)
English
DDC:
620.44
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