Identification and roles of nonstoichiometric oxygen in amorphous Ta2O5 thin films deposited by electron beam and sputtering processes

Mannequin, C. / Tsuruoka, T. / Hasegawa, T. et al. | British Library Online Contents | 2016

Comparision of residual stress and optical properties in Ta2O5 thin films deposited by single and dual ion beam sputtering

Yoon, S. G. / Kim, Y. T. / Kim, H. K. et al. | British Library Online Contents | 2005

Electron beam induced crystallization of sputter deposited amorphous alumina thin films

Murray, J. / Song, K. / Huebner, W. et al. | British Library Online Contents | 2012

Transparent oxygen impermeable AlOx thin films on polycarbonate deposited by reactive ion beam sputtering

Seong, J. W. / Kim, S. M. / Choi, D. et al. | British Library Online Contents | 2005

Optimization of nitrogenated amorphous carbon films deposited by dual ion beam sputtering

Cheah, L.K. / Shi, X. / Liu, E. et al. | British Library Online Contents | 1999