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Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition
Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition
Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition
Jang, Yujin (author) / Yeo, Seungmin (author) / Lee, Han-Bo-Ram (author) / Kim, Hyungjun (author) / Kim, Soo-Hyun (author)
Applied surface science ; 365 ; 160-165
2016-01-01
6 pages
Article (Journal)
English
DDC:
620.44
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Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition
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