Structural and electrical characterization of multilayer Al2O3/ZnO nanolaminates grown by atomic layer deposition

Martínez-Castelo, J.R. / López, J. / Domínguez, D. et al. | British Library Online Contents | 2017

Structural and electrical characterization of multilayer Al2O3/ZnO nanolaminates grown by atomic layer deposition

Martínez-Castelo, J.R. / López, J. / Domínguez, D. et al. | British Library Online Contents | 2017

Atomic layer deposition of TiO~2 and Al~2O~3 thin films and nanolaminates

Mitchell, D. R. G. / Triani, G. / Attard, D. J. et al. | British Library Online Contents | 2006

Structural properties of Al2O3 dielectrics grown on TiN metal substrates by atomic layer deposition

Hsieh, C. I. / Pan, T. M. / Lin, J. C. et al. | British Library Online Contents | 2009

Thermal stability, structural and electrical characteristics of the modulated HfO2/Al2O3 films fabricated by atomic layer deposition

Nie, X. / Ma, D. / Ma, F. et al. | British Library Online Contents | 2017