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Effect of the vacuum degree on the orientation and the microstructure of β-SiC films prepared by laser chemical vapour deposition
Effect of the vacuum degree on the orientation and the microstructure of β-SiC films prepared by laser chemical vapour deposition
Effect of the vacuum degree on the orientation and the microstructure of β-SiC films prepared by laser chemical vapour deposition
Li, Qi (Autor:in) / Katsui, Hirokazu (Autor:in) / Goto, Takashi (Autor:in) / Tu, Rong (Autor:in)
MATERIALS LETTERS ; 182 ; 81-84
01.01.2016
4 pages
Aufsatz (Zeitschrift)
Unbekannt
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