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Effect of the vacuum degree on the orientation and the microstructure of β-SiC films prepared by laser chemical vapour deposition
Effect of the vacuum degree on the orientation and the microstructure of β-SiC films prepared by laser chemical vapour deposition
Effect of the vacuum degree on the orientation and the microstructure of β-SiC films prepared by laser chemical vapour deposition
Li, Qi (author) / Katsui, Hirokazu (author) / Goto, Takashi (author) / Tu, Rong (author)
MATERIALS LETTERS ; 182 ; 81-84
2016-01-01
4 pages
Article (Journal)
Unknown
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