Investigation of "fur-like" residues post dry etching of polyimide using aluminum hard etch mask

Joshi, Shivani / Savov, Angel / Shafqat, Salman et al. | British Library Online Contents | 2018

TITANIUM NITRIDE HARD MASK AND ETCH RESIDUE REMOVAL

Europäisches Patentamt | 2016

TITANIUM NITRIDE HARD MASK AND ETCH RESIDUE REMOVAL

CASTEEL JR WILLIAM JACK / INAOKA SEIJI / LIU WEN DAR et al. | Europäisches Patentamt | 2016

The Process Transfer of Oxygen Reactive Ion Etching of Polyimide between Different Etch Equipments

Hydes, A. J. / Cox, T. I. / Hope, D. A. O. et al. | Springer Verlag | 1990

Investigation of etch characteristics of non-polar GaN by wet chemical etching

Hsu, H. C. / Su, Y. K. / Cheng, S. H. et al. | British Library Online Contents | 2010