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Structural and optical properties of Ni-embedded hydrogenated diamond-like carbon (Ni-DLC) prepared by co-deposition of RF-Sputtering and RF-PECVD method
Structural and optical properties of Ni-embedded hydrogenated diamond-like carbon (Ni-DLC) prepared by co-deposition of RF-Sputtering and RF-PECVD method
Structural and optical properties of Ni-embedded hydrogenated diamond-like carbon (Ni-DLC) prepared by co-deposition of RF-Sputtering and RF-PECVD method
Mohammadinia, Elnaz (Autor:in) / Elahi, Seyed Mohammad (Autor:in) / Shahidi, Sheila (Autor:in)
Materials science in semiconductor processing ; 74 ; 7-12
01.01.2018
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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