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Optical and Structural Properties of Nitrogenated Diamond-Like Carbon Films Prepared by r.f. PECVD
Optical and Structural Properties of Nitrogenated Diamond-Like Carbon Films Prepared by r.f. PECVD
Optical and Structural Properties of Nitrogenated Diamond-Like Carbon Films Prepared by r.f. PECVD
Rusop, M. ( Autor:in ) / Abdullah, S. ( Autor:in ) / Podder, J. ( Autor:in ) / Soga, T. ( Autor:in ) / Jimbo, T. ( Autor:in )
SURFACE REVIEW AND LETTERS ; 13 ; 1-6
01.01.2006
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
530.417
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