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Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Hyperdoping of Si by ion implantation and pulsed laser melting
Hyperdoping of Si by ion implantation and pulsed laser melting
Hyperdoping of Si by ion implantation and pulsed laser melting
Yang, Wenjie (Autor:in) / Mathews, Jay (Autor:in) / Williams, J.S. (Autor:in)
Materials science in semiconductor processing ; 62 ; 103-114
01.01.2017
12 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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