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Study on top sulfur hyperdoping layer covering microstructured Si by fs-laser irradiation
Study on top sulfur hyperdoping layer covering microstructured Si by fs-laser irradiation
Study on top sulfur hyperdoping layer covering microstructured Si by fs-laser irradiation
Wang, Ke (Autor:in) / Gao, Jinsong (Autor:in) / Yang, Haigui (Autor:in) / Wang, Xiaoyi (Autor:in) / Wang, Yanchao (Autor:in) / Zhang, Zhuo (Autor:in)
Applied surface science ; 464 ; 502-508
01.01.2019
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.44
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