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    Hyperdoping of Si by ion implantation and pulsed laser melting

    New search for: Yang, Wenjie
    New search for: Mathews, Jay
    New search for: Williams, J.S.

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    Hyperdoping of Si by ion implantation and pulsed laser melting

    New search for: Yang, Wenjie
    New search for: Mathews, Jay
    New search for: Williams, J.S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Hyperdoping of Si by ion implantation and pulsed laser melting

    New search for: Yang, Wenjie
    New search for: Mathews, Jay
    New search for: Williams, J.S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Hyperdoping of Si by ion implantation and pulsed laser melting

    Contributors:

    Yang, Wenjie (author) / Mathews, Jay (author) / Williams, J.S. (author)

    Published in:

    Materials science in semiconductor processing ; 62 ; 103-114

    Publication date:

    2017-01-01

    Size:

    12 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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