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Study on top sulfur hyperdoping layer covering microstructured Si by fs-laser irradiation
Study on top sulfur hyperdoping layer covering microstructured Si by fs-laser irradiation
Study on top sulfur hyperdoping layer covering microstructured Si by fs-laser irradiation
Wang, Ke (author) / Gao, Jinsong (author) / Yang, Haigui (author) / Wang, Xiaoyi (author) / Wang, Yanchao (author) / Zhang, Zhuo (author)
Applied surface science ; 464 ; 502-508
2019-01-01
7 pages
Article (Journal)
English
DDC:
620.44
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