Low temperature growth of polycrystalline InN films on non-crystalline substrates by plasma-enhanced atomic layer deposition

Peng, Hong / Feng, Xingcan / Gong, Jinhui et al. | British Library Online Contents | 2018

Structural and electrical properties of AlN thin films on GaN substrates grown by plasma enhanced-Atomic Layer Deposition

Schilirò, Emanuela / Giannazzo, Filippo / Bongiorno, Corrado et al. | British Library Online Contents | 2019

[100]-textured growth of polycrystalline diamond films on alumina substrates by microwave plasma chemical vapor deposition

Wang, L. / Lu, J. / Su, Q. et al. | British Library Online Contents | 2006

Controlled growth and properties of p-type cuprous oxide films by plasma-enhanced atomic layer deposition at low temperature

Kwon, J. D. / Kwon, S. H. / Jung, T. H. et al. | British Library Online Contents | 2013

XPS analysis of AlN thin films deposited by plasma enhanced atomic layer deposition

Motamedi, P. / Cadien, K. | British Library Online Contents | 2014