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    Low temperature growth of polycrystalline InN films on non-crystalline substrates by plasma-enhanced atomic layer deposition

    New search for: Peng, Hong
    New search for: Feng, Xingcan
    New search for: Gong, Jinhui
    New search for: Wang, Wei
    New search for: Liu, Hu
    New search for: Quan, Zhijue
    New search for: Pan, Shuan
    New search for: Wang, Li

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    Low temperature growth of polycrystalline InN films on non-crystalline substrates by plasma-enhanced atomic layer deposition

    New search for: Peng, Hong
    New search for: Feng, Xingcan
    New search for: Gong, Jinhui
    New search for: Wang, Wei
    New search for: Liu, Hu
    New search for: Quan, Zhijue
    New search for: Pan, Shuan
    New search for: Wang, Li

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Low temperature growth of polycrystalline InN films on non-crystalline substrates by plasma-enhanced atomic layer deposition

    New search for: Peng, Hong
    New search for: Feng, Xingcan
    New search for: Gong, Jinhui
    New search for: Wang, Wei
    New search for: Liu, Hu
    New search for: Quan, Zhijue
    New search for: Pan, Shuan
    New search for: Wang, Li

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Low temperature growth of polycrystalline InN films on non-crystalline substrates by plasma-enhanced atomic layer deposition

    Contributors:

    Peng, Hong (author) / Feng, Xingcan (author) / Gong, Jinhui (author) / Wang, Wei (author) / Liu, Hu (author) / Quan, Zhijue (author) / Pan, Shuan (author) / Wang, Li (author)

    Published in:

    Applied surface science ; 459 ; 830-834

    Publication date:

    2018-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.44

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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