Selective etching of PDMS: Etching technique for application as a positive tone resist

Szilasi, S.Z. / Cserháti, C. | British Library Online Contents | 2018

Selective etching of PDMS: Etching technique for application as a positive tone resist

Szilasi, S.Z. / Cserháti, C. | British Library Online Contents | 2018

Selective etching of PDMS: Etching as a negative tone resist

Szilasi, S.Z. / Juhasz, L. | British Library Online Contents | 2018

Analysis of sidewall buildup during trilevel resist etching of metal

Ha, J. H. / Jung, J.-K. / Seol, Y.-S. et al. | British Library Online Contents | 1997

Diamond growth on carbide surfaces using a selective etching technique

Grannen, K. J. / Chang, R. P. H. | British Library Online Contents | 1994