Selective etching of PDMS: Etching technique for application as a positive tone resist

Szilasi, S.Z. / Cserháti, C. | British Library Online Contents | 2018

Selective etching of PDMS: Etching technique for application as a positive tone resist

Szilasi, S.Z. / Cserháti, C. | British Library Online Contents | 2018

Selective etching of PDMS: Etching technique for application as a positive tone resist

Szilasi, S.Z. / Cserháti, C. | British Library Online Contents | 2018

Analysis of sidewall buildup during trilevel resist etching of metal

Ha, J. H. / Jung, J.-K. / Seol, Y.-S. et al. | British Library Online Contents | 1997

Selective etching of InP in NaF solution

Weng, Z. / Zhang, W. / Wu, C. et al. | British Library Online Contents | 2010