Strain evolution of SiGe-on-insulator fabricated by germanium condensation method with over-oxidation

Lin, Guangyang / Lan, Xiaoling / Chen, Ningli et al. | British Library Online Contents | 2016

Ge-on-insulator wafer with ultralow defect density fabricated by direct condensation of SiGe-on-insulator structure

Ye, Lin / Zhang, Miao / Xue, Zhongyin et al. | British Library Online Contents | 2015

Ge-on-insulator wafer with ultralow defect density fabricated by direct condensation of SiGe-on-insulator structure

Ye, L. / Zhang, M. / Xue, Z. et al. | British Library Online Contents | 2015

Strain/composition interplay in thin SiGe layers on insulator processed by Ge condensation

Boureau, Victor / Benoit, Daniel / Warot, Bénédicte et al. | British Library Online Contents | 2016

Fabrication of high Ge content SiGe-on-insulator with low dislocation density by modified Ge condensation

Ma, X. / Liu, W. / Chen, C. et al. | British Library Online Contents | 2009