Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Effect of multi-functional amines on SiGe surface finish during chemical mechanical polishing
Effect of multi-functional amines on SiGe surface finish during chemical mechanical polishing
Effect of multi-functional amines on SiGe surface finish during chemical mechanical polishing
Yang, Shenghua (Autor:in) / Zhang, Baoguo (Autor:in) / Wang, Chenwei (Autor:in) / He, Yangang (Autor:in) / Wang, Jianchao (Autor:in) / Wang, Ru (Autor:in) / Liu, Yuling (Autor:in)
Materials science in semiconductor processing ; 99 ; 114-124
01.01.2019
11 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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