Experimental characterisation of FIB induced lateral damage on silicon carbide samples: Fid-Bau Portal

Experimental characterisation of FIB induced lateral damage on silicon carbide samples

Stumpf, Florian / Rumler, Maximilian / Abu Quba, Abd Alaziz / Singer, Philipp / Rommel, Mathias

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Experimental characterisation of FIB induced lateral damage on silicon carbide samples

Stumpf, Florian / Rumler, Maximilian / Abu Quba, Abd Alaziz / Singer, Philipp / Rommel, Mathias

Experimental characterisation of FIB induced lateral damage on silicon carbide samples

Stumpf, Florian / Rumler, Maximilian / Abu Quba, Abd Alaziz / Singer, Philipp / Rommel, Mathias

Zugriff

Seitennavigation

Exportieren, teilen und zitieren

Dokumentinformationen

Titel:

Experimental characterisation of FIB induced lateral damage on silicon carbide samples

Beteiligte:

Erscheinungsdatum:

2015

DOI:

https://doi.org/10.24406/publica-fhg-389167

Medientyp:

Sonstige

Format:

Elektronische Ressource

Sprache:

Unbekannt

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