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Sintering bearing plate and sintering method of planar ceramic target material
The invention discloses a sintering bearing plate and a sintering method of a planar ceramic target material. The burning bearing plate comprises a supporting surface and a horizontal plane, wherein the supporting surface is an inclined plane forming an inclination angle with the horizontal plane, the inclination angle of the supporting surface relative to the horizontal plane is 10-30 degrees, and the supporting surface is provided with a plurality of strip-shaped corrugated protrusions which are evenly distributed at intervals and are parallel to one another. A planar ceramic target materialgreen body is placed on the burning bearing plate with the strip-shaped corrugated bulges on the inclined surface for sintering, air permeability of a target material is improved, sufficient sintering of the target material can be promoted, the inclination angle of the supporting surface of the sintering bearing plate relative to the horizontal plane is 10-30 degrees, the friction force between atarget material green body and the sintering bearing plate due to shrinkage during sintering can be greatly reduced, target material densification is facilitated, defects of deformation, cracking andthe like of the target material are prevented, and the yield of the target material is greatly increased.
本发明公开了一种承烧板及平面陶瓷靶材的烧结方法。所述承烧板包括支撑面和水平面,支撑面为与水平面呈倾斜角度的斜面,且支撑面相对于水平面的倾斜角为10°‑30°;所述支撑面设有若干个均匀间隔分布且互相平行的条状波纹凸起。本发明通过将平面陶瓷靶材生坯置于斜面设有条状波纹凸起的承烧板上进行烧结,提高靶材的透气性,能够促进靶材的充分烧结,而且承烧板的支撑面相对于水平面的倾斜角为10°‑30°,可极大的降低靶材生坯在烧结时因收缩导致与承烧板的摩擦力,有利于靶材致密化及防止靶材产生变形、开裂等缺陷,极大的提高了靶材的良率。
Sintering bearing plate and sintering method of planar ceramic target material
The invention discloses a sintering bearing plate and a sintering method of a planar ceramic target material. The burning bearing plate comprises a supporting surface and a horizontal plane, wherein the supporting surface is an inclined plane forming an inclination angle with the horizontal plane, the inclination angle of the supporting surface relative to the horizontal plane is 10-30 degrees, and the supporting surface is provided with a plurality of strip-shaped corrugated protrusions which are evenly distributed at intervals and are parallel to one another. A planar ceramic target materialgreen body is placed on the burning bearing plate with the strip-shaped corrugated bulges on the inclined surface for sintering, air permeability of a target material is improved, sufficient sintering of the target material can be promoted, the inclination angle of the supporting surface of the sintering bearing plate relative to the horizontal plane is 10-30 degrees, the friction force between atarget material green body and the sintering bearing plate due to shrinkage during sintering can be greatly reduced, target material densification is facilitated, defects of deformation, cracking andthe like of the target material are prevented, and the yield of the target material is greatly increased.
本发明公开了一种承烧板及平面陶瓷靶材的烧结方法。所述承烧板包括支撑面和水平面,支撑面为与水平面呈倾斜角度的斜面,且支撑面相对于水平面的倾斜角为10°‑30°;所述支撑面设有若干个均匀间隔分布且互相平行的条状波纹凸起。本发明通过将平面陶瓷靶材生坯置于斜面设有条状波纹凸起的承烧板上进行烧结,提高靶材的透气性,能够促进靶材的充分烧结,而且承烧板的支撑面相对于水平面的倾斜角为10°‑30°,可极大的降低靶材生坯在烧结时因收缩导致与承烧板的摩擦力,有利于靶材致密化及防止靶材产生变形、开裂等缺陷,极大的提高了靶材的良率。
Sintering bearing plate and sintering method of planar ceramic target material
一种承烧板及平面陶瓷靶材的烧结方法
XU JIWEN (Autor:in) / LEI YU (Autor:in) / ZHOU ZHIHONG (Autor:in) / XIAO SHIHONG (Autor:in) / YANG YONGTIAN (Autor:in)
14.04.2020
Patent
Elektronische Ressource
Chinesisch
IPC:
F27D
Einzelheiten oder Zubehör für Industrieöfen, Schachtöfen, Brennöfen oder Retorten, soweit sie nicht auf eine Ofenart eingeschränkt sind
,
DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
/
C04B
Kalk
,
LIME
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