Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Digital twinning control method for temperature field of silicon carbide coating deposition furnace
The invention discloses a digital twinning control method for a temperature field of a silicon carbide coating deposition furnace. The method comprises the following steps: (1) dividing the space in the deposition furnace into a plurality of control regions, and installing a temperature sensor in each control region; (2) collecting the actual temperature value of each control region detected by the temperature sensor in each control region and transmitting the actual temperature value to digital twinning equipment; (3) calculating the difference between the actual temperature value of each control region and the theoretical temperature value of each control region; and (4) performing temperature compensation on each control region according to the difference value. A digital twinning technology is utilized to construct a digital twinning model for the space in the deposition furnace in a regional manner, the temperature in the deposition furnace is monitored in real time according to regions during production and an error compensation result is obtained by fusing the acquired actual temperature and theoretical data so that regional temperature compensation is carried out, the problem of poor distribution uniformity of the temperature field in the deposition furnace is solved and a high-quality silicon carbide coating is obtained.
本发明公开了一种碳化硅涂层沉积炉温度场的数字孪生控制方法，包括以下步骤：（1）将沉积炉的炉内空间划分成多个控制区域，并在各控制区域内分别安装温度传感器；（2）采集各控制区域内的温度传感器检测到的各控制区域的实际温度值并传送给数字孪生设备；（3）计算出各控制区域的实际温度值与各控制区域的理论温度值之间的差值；（4）根据差值对各控制区域进行温度补偿。本发明利用数字孪生技术，对沉积炉内空间分区域建造数字孪生模型，达到生产时，分区域实时监控沉积炉内温度，通过对采集的实际温度与理论数据融合，得到误差补偿结果，以此进行分区域温度补偿，解决了沉积炉内温度场分布均匀性差的问题，获得高质量的碳化硅涂层。
Digital twinning control method for temperature field of silicon carbide coating deposition furnace
The invention discloses a digital twinning control method for a temperature field of a silicon carbide coating deposition furnace. The method comprises the following steps: (1) dividing the space in the deposition furnace into a plurality of control regions, and installing a temperature sensor in each control region; (2) collecting the actual temperature value of each control region detected by the temperature sensor in each control region and transmitting the actual temperature value to digital twinning equipment; (3) calculating the difference between the actual temperature value of each control region and the theoretical temperature value of each control region; and (4) performing temperature compensation on each control region according to the difference value. A digital twinning technology is utilized to construct a digital twinning model for the space in the deposition furnace in a regional manner, the temperature in the deposition furnace is monitored in real time according to regions during production and an error compensation result is obtained by fusing the acquired actual temperature and theoretical data so that regional temperature compensation is carried out, the problem of poor distribution uniformity of the temperature field in the deposition furnace is solved and a high-quality silicon carbide coating is obtained.
本发明公开了一种碳化硅涂层沉积炉温度场的数字孪生控制方法，包括以下步骤：（1）将沉积炉的炉内空间划分成多个控制区域，并在各控制区域内分别安装温度传感器；（2）采集各控制区域内的温度传感器检测到的各控制区域的实际温度值并传送给数字孪生设备；（3）计算出各控制区域的实际温度值与各控制区域的理论温度值之间的差值；（4）根据差值对各控制区域进行温度补偿。本发明利用数字孪生技术，对沉积炉内空间分区域建造数字孪生模型，达到生产时，分区域实时监控沉积炉内温度，通过对采集的实际温度与理论数据融合，得到误差补偿结果，以此进行分区域温度补偿，解决了沉积炉内温度场分布均匀性差的问题，获得高质量的碳化硅涂层。
Digital twinning control method for temperature field of silicon carbide coating deposition furnace
一种碳化硅涂层沉积炉温度场的数字孪生控制方法
PENG YUQING (Autor:in) / XIN JIPING (Autor:in)
24.04.2020
Patent
Elektronische Ressource
Chinesisch
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