Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Carbon/carbon heater with silicon carbide coating for Czochralski silicon single crystal furnace
The invention discloses a carbon/carbon heater with a silicon carbide coating for a Czochralski silicon single crystal furnace. The heater is manufactured through a method which comprises the following steps: 1, alternately laminating and needling T700 carbon fiber unidirectional cloth and carbon fiber net tires to form a heater prefabricated body; 2, mixing the silicon carbide micro-powder, absolute ethyl alcohol and a surfactant according to a certain proportion to form slurry; 3, placing the prefabricated body obtained in the step 2 in a drying furnace at the temperature of 85 DEG C; 4, putting the treated heater prefabricated body into a chemical vapor deposition furnace; 5, carrying out high-temperature graphitization treatment on the heater blank; 6, machining the carbon/carbon heater blank; and 7, treating the processed carbon/carbon heater in a chemical vapor deposition furnace to obtain the carbon/carbon composite material heater with the silicon carbide coating. According tothe technical scheme, the silicon carbide coating is prepared through chemical vapor deposition, the coating on the surface of the carbon/carbon heater is uniform, the problem of silicon corrosion ofthe carbon/carbon heater is effectively solved, and the service life of the carbon/carbon heater is prolonged.
本发明公开了一种直拉单晶硅炉用碳化硅涂层的碳/碳加热器，包括以下步骤：一、将T700碳纤维单向布和碳纤维网胎交替叠层针刺成加热器预制体；二、将碳化硅微粉、无水乙醇和表面活性剂按照一定比列混合为浆料；三、将二中得到的预制体置于85℃的烘干炉内；四、将处理好的加热器预制体放入化学气相沉积炉内；五、将加热器毛坯进行高温石墨化处理；六、将碳/碳加热器毛坯进行机械加工；七、将加工好的碳/碳加热器放入化学气相沉积炉内，得到碳化硅涂层的碳/碳复合材料加热器。其技术方案要点是，本发明的碳化硅涂层是采用化学气相沉积制备的，碳/碳加热器表面涂层较为均匀，有效解决了碳/碳加热器的硅蚀问题，延长了碳/碳加热器的使用寿命。
Carbon/carbon heater with silicon carbide coating for Czochralski silicon single crystal furnace
The invention discloses a carbon/carbon heater with a silicon carbide coating for a Czochralski silicon single crystal furnace. The heater is manufactured through a method which comprises the following steps: 1, alternately laminating and needling T700 carbon fiber unidirectional cloth and carbon fiber net tires to form a heater prefabricated body; 2, mixing the silicon carbide micro-powder, absolute ethyl alcohol and a surfactant according to a certain proportion to form slurry; 3, placing the prefabricated body obtained in the step 2 in a drying furnace at the temperature of 85 DEG C; 4, putting the treated heater prefabricated body into a chemical vapor deposition furnace; 5, carrying out high-temperature graphitization treatment on the heater blank; 6, machining the carbon/carbon heater blank; and 7, treating the processed carbon/carbon heater in a chemical vapor deposition furnace to obtain the carbon/carbon composite material heater with the silicon carbide coating. According tothe technical scheme, the silicon carbide coating is prepared through chemical vapor deposition, the coating on the surface of the carbon/carbon heater is uniform, the problem of silicon corrosion ofthe carbon/carbon heater is effectively solved, and the service life of the carbon/carbon heater is prolonged.
本发明公开了一种直拉单晶硅炉用碳化硅涂层的碳/碳加热器，包括以下步骤：一、将T700碳纤维单向布和碳纤维网胎交替叠层针刺成加热器预制体；二、将碳化硅微粉、无水乙醇和表面活性剂按照一定比列混合为浆料；三、将二中得到的预制体置于85℃的烘干炉内；四、将处理好的加热器预制体放入化学气相沉积炉内；五、将加热器毛坯进行高温石墨化处理；六、将碳/碳加热器毛坯进行机械加工；七、将加工好的碳/碳加热器放入化学气相沉积炉内，得到碳化硅涂层的碳/碳复合材料加热器。其技术方案要点是，本发明的碳化硅涂层是采用化学气相沉积制备的，碳/碳加热器表面涂层较为均匀，有效解决了碳/碳加热器的硅蚀问题，延长了碳/碳加热器的使用寿命。
Carbon/carbon heater with silicon carbide coating for Czochralski silicon single crystal furnace
一种直拉单晶硅炉用碳化硅涂层的碳/碳加热器
FAN QIANGUO (Autor:in) / JIA WULIN (Autor:in) / HOU GUANGYUAN (Autor:in) / YANG HAO (Autor:in)
28.04.2020
Patent
Elektronische Ressource
Chinesisch
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