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Preparation method of novel silicon-based coating on surface of carbon/carbon composite material for monocrystalline silicon Czochralski furnace
The invention discloses a preparation method of a novel silicon-based coating on the surface of a carbon/carbon composite material for a monocrystalline silicon Czochralski furnace, which comprises the following steps: mixing PVA sol with silicon powder to prepare slurry, and preparing a silicon carbide-based compact layer on the surface of the carbon/carbon composite material, so that a surface layer and a matrix are tightly combined and stably transited; therefore, the oxidation corrosion resistance and the surface mechanical property of the carbon/carbon composite material are improved.
本发明公开一种单晶硅直拉炉用碳/碳复材表面新型硅基涂层的制备方法,其以PVA溶胶与硅粉混合制成浆料,在碳/碳复合材料表面制备一层碳化硅基致密层,使表层与基体结合紧密,平稳过渡,从而提高碳/碳复合材料抗氧化腐蚀性能和表面力学性能。
Preparation method of novel silicon-based coating on surface of carbon/carbon composite material for monocrystalline silicon Czochralski furnace
The invention discloses a preparation method of a novel silicon-based coating on the surface of a carbon/carbon composite material for a monocrystalline silicon Czochralski furnace, which comprises the following steps: mixing PVA sol with silicon powder to prepare slurry, and preparing a silicon carbide-based compact layer on the surface of the carbon/carbon composite material, so that a surface layer and a matrix are tightly combined and stably transited; therefore, the oxidation corrosion resistance and the surface mechanical property of the carbon/carbon composite material are improved.
本发明公开一种单晶硅直拉炉用碳/碳复材表面新型硅基涂层的制备方法,其以PVA溶胶与硅粉混合制成浆料,在碳/碳复合材料表面制备一层碳化硅基致密层,使表层与基体结合紧密,平稳过渡,从而提高碳/碳复合材料抗氧化腐蚀性能和表面力学性能。
Preparation method of novel silicon-based coating on surface of carbon/carbon composite material for monocrystalline silicon Czochralski furnace
一种单晶硅直拉炉用碳/碳复材表面新型硅基涂层的制备方法
YU XIONGJUN (Autor:in)
09.03.2021
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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