Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Rare-earth oxide based monolithic chamber material
A solid sintered ceramic article may include a solid solution comprising Y2O3 at a concentration of approximately 30 molar % to approximately 60 molar %, Er2O3 at a concentration of approximately 20 molar % to approximately 60 molar %, and at least one of ZrO2, Gd2O3 or SiO2 at a concentration of approximately 0 molar % to approximately 30 molar %. Alternatively, the solid sintered ceramic articlea solid solution comprising 40-100 mol% of Y2O3, 0-50 mol% of ZrO2, and 0-40 mol% of Al2O3.
本申请公开了稀土氧化物基单片式腔室材料。一种固体烧结陶瓷制品可包括固溶体，所述固溶体包含：约30摩尔％至约60摩尔％的浓度的YO；约20摩尔％至约60摩尔％的浓度的ErO；以及约0摩尔％至约30摩尔％的浓度的ZrO、GdO或SiO的至少一者。或者，所述固体烧结陶瓷制品可包括固溶体，所述固溶体包含40‑100摩尔％的YO、0‑50摩尔％的ZrO以及0‑40摩尔％的AlO。
Rare-earth oxide based monolithic chamber material
A solid sintered ceramic article may include a solid solution comprising Y2O3 at a concentration of approximately 30 molar % to approximately 60 molar %, Er2O3 at a concentration of approximately 20 molar % to approximately 60 molar %, and at least one of ZrO2, Gd2O3 or SiO2 at a concentration of approximately 0 molar % to approximately 30 molar %. Alternatively, the solid sintered ceramic articlea solid solution comprising 40-100 mol% of Y2O3, 0-50 mol% of ZrO2, and 0-40 mol% of Al2O3.
本申请公开了稀土氧化物基单片式腔室材料。一种固体烧结陶瓷制品可包括固溶体，所述固溶体包含：约30摩尔％至约60摩尔％的浓度的YO；约20摩尔％至约60摩尔％的浓度的ErO；以及约0摩尔％至约30摩尔％的浓度的ZrO、GdO或SiO的至少一者。或者，所述固体烧结陶瓷制品可包括固溶体，所述固溶体包含40‑100摩尔％的YO、0‑50摩尔％的ZrO以及0‑40摩尔％的AlO。
Rare-earth oxide based monolithic chamber material
稀土氧化物基单片式腔室材料
JENNIFER Y SUN (Autor:in) / BIRAJA P KANUNGO (Autor:in)
05.06.2020
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME