Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Crucible boat for cadmium telluride/cadmium sulfide/cadmium selenide film deposition and preparation method therefor
The invention discloses a crucible boat for cadmium telluride/cadmium sulfide/cadmium selenide film deposition and a preparation method therefor. The crucible boat is formed by processing high-puritygraphite; a raw material tank is formed in the crucible boat; a thermocouple mounting column is arranged at the bottom of the raw material tank; a thermocouple mounting hole is formed in the top of the thermocouple mounting column; a plurality of heating pipe mounting grooves are formed in the outer wall of the bottom of the crucible boat; electric heating pipes are embedded into the heating pipemounting grooves; a crucible cover is detachably arranged on the crucible boat; graphite conductive rod mounting holes are formed in the two sides of the crucible boat; the graphite conductive rod mounting holes are used for mounting graphite conductive rods on the crucible cover; gaps must be reserved between the graphite conductive rods arranged in the graphite conductive rod mounting holes in apenetrating manner and the crucible boat; and the graphite conductive rods cannot be in direct contact with the crucible boat. The crucible boat has a semiconductor raw material containing function and a raw material heating sublimation function.
本发明公开了一种碲化镉/硫化镉/硒化镉薄膜沉积用坩埚舟及其制备方法，所述坩埚舟采用高纯石墨加工而成，所述坩埚舟上开设有原料槽，所述原料槽的槽底设置有热电偶安装柱，所述热电偶安装柱的顶部开设有热电偶安装孔；所述坩埚舟的底部外壁设置有若干加热管安装槽，所述加热管安装槽内嵌入安装有电加热管；所述坩埚舟上可拆卸设置有坩埚盖，所述坩埚舟的两侧均设置有石墨导电棒安装孔，所述石墨导电棒安装孔用于安装所述坩埚盖上的石墨导电棒，所述石墨导电棒安装孔内穿设的石墨导电棒与所述坩埚舟之间必须留有间隙，不能直接接触。本发明的坩埚舟兼具半导体原料盛装的功能和原料加热升华的功能。
Crucible boat for cadmium telluride/cadmium sulfide/cadmium selenide film deposition and preparation method therefor
The invention discloses a crucible boat for cadmium telluride/cadmium sulfide/cadmium selenide film deposition and a preparation method therefor. The crucible boat is formed by processing high-puritygraphite; a raw material tank is formed in the crucible boat; a thermocouple mounting column is arranged at the bottom of the raw material tank; a thermocouple mounting hole is formed in the top of the thermocouple mounting column; a plurality of heating pipe mounting grooves are formed in the outer wall of the bottom of the crucible boat; electric heating pipes are embedded into the heating pipemounting grooves; a crucible cover is detachably arranged on the crucible boat; graphite conductive rod mounting holes are formed in the two sides of the crucible boat; the graphite conductive rod mounting holes are used for mounting graphite conductive rods on the crucible cover; gaps must be reserved between the graphite conductive rods arranged in the graphite conductive rod mounting holes in apenetrating manner and the crucible boat; and the graphite conductive rods cannot be in direct contact with the crucible boat. The crucible boat has a semiconductor raw material containing function and a raw material heating sublimation function.
本发明公开了一种碲化镉/硫化镉/硒化镉薄膜沉积用坩埚舟及其制备方法，所述坩埚舟采用高纯石墨加工而成，所述坩埚舟上开设有原料槽，所述原料槽的槽底设置有热电偶安装柱，所述热电偶安装柱的顶部开设有热电偶安装孔；所述坩埚舟的底部外壁设置有若干加热管安装槽，所述加热管安装槽内嵌入安装有电加热管；所述坩埚舟上可拆卸设置有坩埚盖，所述坩埚舟的两侧均设置有石墨导电棒安装孔，所述石墨导电棒安装孔用于安装所述坩埚盖上的石墨导电棒，所述石墨导电棒安装孔内穿设的石墨导电棒与所述坩埚舟之间必须留有间隙，不能直接接触。本发明的坩埚舟兼具半导体原料盛装的功能和原料加热升华的功能。
Crucible boat for cadmium telluride/cadmium sulfide/cadmium selenide film deposition and preparation method therefor
一种碲化镉/硫化镉/硒化镉薄膜沉积用坩埚舟及其制备方法
FAN ZHONGJUN (Autor:in) / CHEN YING (Autor:in) / ZHOU XIANHUA (Autor:in) / YIN XINJIAN (Autor:in)
05.01.2021
Patent
Elektronische Ressource
Chinesisch
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