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Gel casting preparation method of nickel oxide-based ceramic target material
The invention relates to a gel casting preparation method of a nickel oxide-based ceramic target material. The gel casting preparation method comprises the following steps of A, preparing raw materials, B, preparing a premixed solution, C, preparing high-fluidity slurry, D, preparing a biscuit, E, degumming the biscuit: carrying out gradient heating on the biscuit, and carrying out furnace coolingto obtain a degummed blank, F, sintering: specifically, enabling the blank to be subjected to vacuum gradient sintering with the first gradient temperature of 650-800 DEG C, the temperature rising speed not higher than 1.5 DEG C/min, and the heat preservation time not shorter than 2 hours, heating to a second gradient temperature of 900-1200 DEG C at a heating speed of not higher than 1 DEG C/min, keeping the temperature for not less than 5 hours, cooling and molding, and G, machining, specifically, conducting or not conducting machining according to needs. The preparation method can be usedfor preparing the nickel oxide-based ceramic target material with good conductivity, higher purity and fine grain size, and is simple and convenient to operate and low in cost.
本发明涉及一种氧化镍基陶瓷靶材材料的凝胶注模成型制备方法，包括以下步骤：A原料准备；B制备预混液；C制备高流动性浆料；D制备素坯；E素坯脱胶：将素坯进行梯度升温，随炉冷却，得到脱胶后的坯料；F烧结：将坯料进行真空梯度烧结，第一梯度温度650‑800℃，升温速度不高于1.5℃/min，保温时间不低于2小时；而后升温至第二梯度温度900‑1200℃，升温速度不高于1℃/min，保温时间不低于5小时，冷却成型；G机加工：根据需要进行或不进行机加工。该种制备方法能制备出导电性良好、纯度较高、晶粒尺寸细小的氧化镍基陶瓷靶材材料，且该种制备方法操作简便、成本低廉。
Gel casting preparation method of nickel oxide-based ceramic target material
The invention relates to a gel casting preparation method of a nickel oxide-based ceramic target material. The gel casting preparation method comprises the following steps of A, preparing raw materials, B, preparing a premixed solution, C, preparing high-fluidity slurry, D, preparing a biscuit, E, degumming the biscuit: carrying out gradient heating on the biscuit, and carrying out furnace coolingto obtain a degummed blank, F, sintering: specifically, enabling the blank to be subjected to vacuum gradient sintering with the first gradient temperature of 650-800 DEG C, the temperature rising speed not higher than 1.5 DEG C/min, and the heat preservation time not shorter than 2 hours, heating to a second gradient temperature of 900-1200 DEG C at a heating speed of not higher than 1 DEG C/min, keeping the temperature for not less than 5 hours, cooling and molding, and G, machining, specifically, conducting or not conducting machining according to needs. The preparation method can be usedfor preparing the nickel oxide-based ceramic target material with good conductivity, higher purity and fine grain size, and is simple and convenient to operate and low in cost.
本发明涉及一种氧化镍基陶瓷靶材材料的凝胶注模成型制备方法，包括以下步骤：A原料准备；B制备预混液；C制备高流动性浆料；D制备素坯；E素坯脱胶：将素坯进行梯度升温，随炉冷却，得到脱胶后的坯料；F烧结：将坯料进行真空梯度烧结，第一梯度温度650‑800℃，升温速度不高于1.5℃/min，保温时间不低于2小时；而后升温至第二梯度温度900‑1200℃，升温速度不高于1℃/min，保温时间不低于5小时，冷却成型；G机加工：根据需要进行或不进行机加工。该种制备方法能制备出导电性良好、纯度较高、晶粒尺寸细小的氧化镍基陶瓷靶材材料，且该种制备方法操作简便、成本低廉。
Gel casting preparation method of nickel oxide-based ceramic target material
一种氧化镍基陶瓷靶材材料的凝胶注模成型制备方法
GAO MING (Autor:in) / ZHANG HU (Autor:in) / ZHANG HUARUI (Autor:in) / YANG BENRUN (Autor:in)
05.02.2021
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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